M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
نویسندگان
چکیده
منابع مشابه
M-TEST: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures
A set of electrostatically actuated microelectromechanical test structures is presented that meets the emerging need for microelectromechanical systems (MEMS) process monitoring and material property measurement at the wafer level during both process development and manufacturing. When implemented as a test chip or drop-in pattern for MEMS processes, M-Test becomes analogous to the electrical M...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 1997
ISSN: 1057-7157
DOI: 10.1109/84.585788